HMDS Oven真空烘箱18026856 (PVD-090-HMDS)
CEE Spin-Hotplate一体机19008323 (APOGEE X-PRO II )
ICP 深反应刻蚀机(Oxford PlasmalabSystem100)13017746 (GB..
SiC Oxidation Furnace碳化硅氧化炉19017620 (Ailesic-X140..
&Nikon Microscope显微镜20031498 (Nikon Optiphot 200)
BOE Wet Bench (BOE清洗台1) 20007462 (SQX-5B)
Develop Wet Bench显影台1 19007060 (SQX-3)
Develop Wet Bench显影台2 19007060 (SQX-3)
Organic Wet Bench-New Lab( 新平台2)19007035 有机清洗台 ..
RTP 12008198 快速退火炉 (RTP-VT100M)